Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met.
Available at and in November 2011 originally published in 1982 previously published November 2003. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. This Standard was technically approved by the Micropatterning Global Technical Committee.
